EP2
PROF. JOSÉ-MARÍA ALBELLA MARTÍN
On Tuesday, October 6th 2015, Prof. José-María Albella Martín is going to give a tutorial about Thin Film Growth Phenomena. SFB members and all other interested persons with at least a master's degree are highly welcome.
Prof. Albella's tutorial (Thin Film Growth Phenomena) is going to deal with microscopic processes associated with thin film deposition, from the early stages of atom adsorption, nucleation, etc. to vertical growth of films showing different micro/nanostructures. These topics are going to be treated from a phenomenological perspective by using thermodynamic principles. Finally, the effects of the deposition conditions (pressure, temperature, deposition rate, impurities, etc) on the morphological and structural properties of the films are going to be discussed.
Dr. Albella is Senior scientist at the Surface Physics and Engineering Dept. (Institute of Materials Science, CSIC). Before, he has been a Professor at the Applied Physics Department (Universidad Autónoma de Madrid) where he taught several graduate and doctorate courses on semiconductors, electronic materials and thin films. Presently, he conducts a research group devoted to the study of ceramic coatings for surface treatments for tribological applications (mechanical parts, tools, etc.), using PVD and CVD techniques (sputtering, plasmas, ion beams, etc.).
His course will be taught on Tuesday, October 6th, in the classroom ID 04/401, and it has two parts:
Part I: Nucleation on the surface (10:30 - 12:00)
Lunch (12:00-13:00)
Part II: Vertical growth (13:00-14:30)
In order to register please send and email to
EP2
PROF. STÉPHANE LUCAS
Prof. Stéphane Lucas from Namur University, Belgium, will visit the Chair of Experimental Physics II on Thursday, November 26, 2015, to present the first results of our cooperation. At 14:00 he will give a talk on "On the understanding of state of the art deposition methods like HiPIMS in order to predict film properties by Monte Carlo simulations" in seminar room NB 5/158.
We would like to invite you to attend! From our side titanium films on silicon and the corresponding IEDFs were delivered during HiPIMS. The determination of the morphology, as well as the density and the elastic modulus and the comparison with the model calculations was done by his team.
Abstract:
S. Lucas1, P. Moskovkin1, A. Pflug2, C. Maszl3, A. von Keudell3
1 The University of Namur, Physics of Matter and Radiation (PMR), 61 rue de Bruxelles, B-5000 Namur, Belgium
2 Fraunhofer Institute for Surface Engineering and Thin Films IST, Bienroder Weg 54e, 38108 Braunschweig,
Germany
3 Ruhr-Universität Bochum, Fakultät für Physik und Astronomie, Universitätsstraße 150, D-44780 Bochum
Substrate ion bombardment during deposition plays a major role in thin film microstructure evolution. This has been one of the driving force for the development of state of the art deposition methods like high power impulse magnetron sputtering (HiPIMS) plasmas that generate energetic metal ions at the substrate as compared to conventional direct current magnetron sputtering (dcMS).
In the present study we investigate, by means of computer simulation and experimental validation, the growth of Ti films deposited by such a technique. The simulation work is done using NASCAM, which is a computer program based on kinetic Monte carlo of atomistic deposition. Kinetic Monte Carlo method allows to follow the evolution of large system of particles during longer times, up to 103 s, with relatively low computational effort compared to other techniques, like Molecular dynamic or even other Monte Carlo methods. This Virtual CoaterTM has been recently completed with a mechanical plugin to estimate the mechanical properties of films grown in silico. The code is built to calculate the effective Young’s moduli and Poisson’s ratios of a porous multilayered structure, using the classical formula "Rule of Mixture" (ROM), considering the Voigt’s model (longitudinal components) and Reuss’ model (transversal components).
Special attention is given to investigate the role of high energy particles flux on the properties of Ti films deposited by HiPIMS. Various films were grown at various power densities and for each, the energy distribution of the sputtered Ti+ and Ti2+ ions at the substrate were measured with a temporal resolution of 2 μs experimentally. Special care was given for conditions below and above the runaway regime. The surface morphology (AFM), density (RBS), and Young modulus (Nano-indentation) of the deposited films are compared with the simulated one.
1. MERCUR WINTER SCHOOL ON PLASMA ASTROPARTICLE PHYSICS
This winter school has been held at the Physikzentrum Bad Honnef from 12 to 17.01.2014. The organizers are Wolfgang Rhode, Reinhard Schlickeiser & Julia Tjus. This PhD school consists of block lectures and accompanying exercises, which is intended for further education in corresponding focus areas.
There will be lectures focusing on cosmic ray detection, interaction, and transport. Speakers in these areas include: Giancarlo Brunetti, Brian Lacki, Francis Halzen, Katharina Morik, Günter Sigl, and Eli Waxman.
8TH INTERNATIONAL CONFERENCE ON REACTIVE PLASMAS
The 8th International Conference on Reactive Plasmas and the 31st Symposium on Plasma Processing will be held February 4-7, 2014 at the Fukuoka Convention Center in Fukuoka, Japan. Prof. Dr. Uwe Czarnetzki will give a talk on "An Analytic Model for the Radio-Frequency Sheath".