JUN.-PROF. JAN BENEDIKT GIVES AN INVITED TALK AT SVC TECHCON 2011
The mission of the Society of Vacuum Coaters is “to promote technical excellence by providing a global forum to inform, educate, and engage the members, the technical community, and the public on all aspects of vacuum coating, surface engineering and related technologies.“ Part of this mission is a yearly organization of a TechCon conference, where experts from the academy and industry can present their work and meet each other. This year, the conference has been held in Chicago from April 16th – 21st and was featuring two symposia: Manufacturing and Technology for Thin Film Photovoltaics and Coating Advances and its Impact on the Future of the Vacuum Coating Industry. One of the traditional sessions was also devoted to High Power Impulse Magnetron Sputtering, a topic of the SFB-TR 87. Jun.-Prof. Jan Benedikt was invited to give a talk with the title "Diagnostics of Low and Atmospheric Pressure Plasmas by Means of Mass Spectrometry" in the Plasma Processing session of the conference.
Society of Vacuum Coaters
E-MRS 2011 SPRING MEETING
Prof. Dr. Anjana Devi hatte auf dem E-MRS 2011 Spring Meeting, welches vom 9.-13. Mai 2011 in Nizza, Frankreich stattfand, einen eingeladenen Vortrag über "Rare-earth doped HfO2 films grown by MOCVD and ALD". Hierdurch wurden sowohl das Materials Research Department (MRD) als auch das Research Department "Plasmas with Complex Interactions" repräsentiert.
Resume: Doping of rare-earth metal oxide in HfO2 has gained considerable interest especially for higher permittivity (k) dielectrics in logic and memory devices. The doping is intended to increase the crystallization temperature, stabilize the cubic phase of HfO2 and reduce the leakage currents. Another promising area is that the Gd doping of HfO2 could lead to a dilute magnetic semiconductor. Atomic layer deposition (ALD) and metalorganic chemical vapor deposition (MOCVD) are preferred techniques for growing high quality layers especially for the above mentioned applications. In this presentation, we have demonstrated the growth of rare-earth doped HfO2 films by ALD and MOCVD using the guanidinate class of precursors which possess the prerequisites for ideal ALD and MOCVD processes. The crystalline structure, microstructure and composition of the films were investigated by means of several techniques that include XRD, SEM, AFM, RBS, XPS and AES. The XRD analysis reveals that Gd doping stabilises the higher-k tetragonal phase. Optical measurements were carried out using ellipsometry and Raman spectroscopy and finally the electrical measurements were performed.
IXTH WORKSHOP ON FRONTIERS IN LOW TEMPERATURE PLASMA DIAGNOSTICS (FLTPD IX)
A group of 11 researchers from the Research Department „Plasmas with Complex Interactions“ and the Research Unit FOR 1123 „Physics of Microplasmas“ participated in the Workshop on Frontiers in Low Temperature Plasma Diagnostics (FLTPD IX) in Zinnowitz, Usedom (Germany). In total they presented a number of 15 contributions including 2 invited and 3 topical talks. The meeting was the IXth in a series of very successful biannual workshops and brought together experts in the field of low temperature plasma diagnostics. It was an important and fruitful opportunity for a new generation of plasma scientists to share and discuss the knowledge of these diagnostics with the leading scientists of this field.
ICMCTF 2011 - 38TH INTERNATIONAL CONFERENCE ON METARLLURGICAL COATINGS & THIN FILMS
Four members of the the Research Department "Plasmas with Complex Interactions" and of the SFB-TR 87 attended the ICMCTF conference in San Diego. The participants were namely Teresa de los Arcos, Carles Corbella, Ante Hecimovic, and Marina Prenzel. Everybody had a contribution to this conference and the presentation had a good resonance, which supports the impact of the research within the RD Plasma respectively SFB-TR 87. As a consequence, new connections to other research groups were established.